Topographical / Morphological Surface Characterization
Focus:
3D geometry, contour, roughness, surface structure
2D/3D topography measurements – from macro to nano
Roughness and waviness measurements
Micro- and nanostructure visualisation
Defect and surface morphology analysis
Typical methods:
AFM – Atomic Force Microscopy
3D topography at the nanometre scaleSEM – Scanning Electron Microscopy
Microstructures, surface morphologyConfocal microscopy
High-resolution 3D surface measurementsTactile roughness and contour measurement systems
Roughness, waviness, contour
Chemical Surface Analysis
Focus:
Analysis of chemical composition, bonding states, and contamination.
- Elemental and composition analysis
- Contamination and residue analysis
- Bonding state and chemical state analysis
- Phase and structural characterization
Selected methods:
- EDX/EDS (in SEM)
→ Elemental analysis (less surface-specific than XPS) - XPS – X-ray Photoelectron Spectroscopy
→ Surface chemistry, bonding states, coating thicknesses in the nanometre range - FIB-SIMS – Secondary Ion Mass Spectrometry
→ Trace elements and depth profiles - Raman spectroscopy
Chemical phases, molecular structures - XRD – X-ray Diffractometry
Phase analysis, identification of crystal structures, mixed phases, oxides, crystalline residues
Mechanical Surface Analysis
Focus:
Investigation of mechanical properties such as hardness, elasticity, friction, and wear.
- Determination of hardness and elastic modulus (micro/nano)
- Wear and friction behaviour
- Coating adhesion
- Micro-/nano-mechanics of surfaces
Typical methods:
- Nanoindentation / microindentation
→ Measurement of hardness and elastic modulus in the micro- and nanometre range - Scratch testing
→ Coating adhesion - Tribological tests (pin-on-disk, friction/wear tests)
→ Coefficients of friction, wear rates - Micro-tensile or bending tests (for thin films)
Physical Surface Properties
Focus:
Determination of functional physical surface properties.
- Electrical and magnetic properties (including local measurements)
- Thermal properties of thin surface layers
Methods:
- AFM force modes (KPFM, MFM, EFM)
→ Electrical potentials, magnetic domains - DSC of surface layers
→ Phase transitions, thermal reactions
