Topographical / Morphological Surface Characterization

Focus:
3D geometry, contour, roughness, surface structure

• 2D/3D topography measurements – from macro to nano

• Roughness and waviness measurements

• Micro- and nanostructure visualisation

• Defect and surface morphology analysis

Typical methods:

• AFM – Atomic Force Microscopy
  3D topography at the nanometre scale

• SEM – Scanning Electron Microscopy
  Microstructures, surface morphology

• Confocal microscopy
  High-resolution 3D surface measurements

• Tactile roughness and contour measurement systems
  Roughness, waviness, contour

Chemical Surface Analysis

Focus:
Analysis of chemical composition, bonding states, and contamination.

• Elemental and composition analysis
• Contamination and residue analysis
• Bonding state and chemical state analysis
• Phase and structural characterization

Selected methods:

• EDX/EDS (in SEM)
  → Elemental analysis (less surface-specific than XPS)
• XPS – X-ray Photoelectron Spectroscopy
  → Surface chemistry, bonding states, coating thicknesses in the nanometre range
• FIB-SIMS – Secondary Ion Mass Spectrometry
  → Trace elements and depth profiles
• Raman spectroscopy
  Chemical phases, molecular structures
• XRD – X-ray Diffractometry
  Phase analysis, identification of crystal structures, mixed phases, oxides, crystalline residues

Mechanical Surface Analysis

Focus:
Investigation of mechanical properties such as hardness, elasticity, friction, and wear.

• Determination of hardness and elastic modulus (micro/nano)
• Wear and friction behaviour
• Coating adhesion
• Micro-/nano-mechanics of surfaces

Typical methods:

• Nanoindentation / microindentation
  → Measurement of hardness and elastic modulus in the micro- and nanometre range
• Scratch testing
  → Coating adhesion
• Tribological tests (pin-on-disk, friction/wear tests)
  → Coefficients of friction, wear rates
• Micro-tensile or bending tests (for thin films)

Physical Surface Properties

Focus:
Determination of functional physical surface properties.

• Electrical and magnetic properties (including local measurements)
• Thermal properties of thin surface layers

Methods:

• AFM force modes (KPFM, MFM, EFM)
  → Electrical potentials, magnetic domains
• DSC of surface layers
  → Phase transitions, thermal reactions